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Q-Sys, link to the page with pictures of examples of positioning systems with mechanical bearings    Q-Sys, air bearing, granite, vacuum preload, magnetic preload, dove tail guideway, linear motor, ball screw, optical encoder, laser interferometer, Abbe-error, vibration, damping, natural frequency, speed, velocity, acceleration, jerk, resolution, accuracy, repeatability, straightness, flatness, roll, pitch, yaw    Q-Sys, turn key, laser welding, laser cutting, camera, vision, inspection, helium leak test, safety, CE mark, vacuum oven

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Single axis air bearing platform for lithography applications

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