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high accuracy stage for inspection system

High accuracy stage for inspection system

This linear motor driven stage is one of the main parts in a high accuracy optical inspection platform. Among the specific requirements of the motion stage were excellent dynamic performance combined with very good geometric precision and repeatability. To assist with these it was decided to mount the linear guide rails directly to the prepared surface of a granite plate. This meant the stage performance benefitted from the extremely flat surface that can be created on such a plate. The straightness of motion achieved was 5µm and the flatness of motion 3µm.

6 axes laser machining platform

Six axes platform for laser machining.

To meet the desired accuracy and repeatability figures, five of the six axes use air bearings in conjunction with linear motors and optical encoders. Combined with the granite construction, this provides high stiffness and stability for this surface machining system. The Z-axis uses a custom bonded construction to create an axis with low mass and very high stiffness. This counterbalanced axis carries a harmonic drive to which is mounted the laser galvo head. The finished system yields repeatabilities better than 1 micron, absolute accuracy better than 6 microns and angular errors of less than 5 arcseconds.

DLS 5 axes detector positioning platform

Five axes platform for research.

This platform consists of 5 axes and is designed to operate in a confined space. Directly built on granite, the lower axis has a travel of 1500mm. The other four axes are sitting in pairs on top of this long axis. Travels for both pairs 550mm x 300mm. Under the full load of 100kg the achieved accuracy over full working envelope is 100µm and the lowest mechanical natural frequency is 70Hz.

optical metrology bench

High precision optical metrology bench.

The bench was designed for the laser metrology of optical surfaces. The system includes innovative techniques for maximising the stability and repeatability of measurements while reducing angular errors to a minimum. The air-bearing carriages are driven by linear motors and the platform is also designed to input extremely low levels of heat into its environment.

large format gantry

Large format gantry.

This granite based gantry style platform delivers high performance XY motion over the full footprint of the machine. The gantry beam is driven and encoded at both ends to enable full gantry mode control, ensuring optimum performance. This is another example of the custom platform designs available from Q-Sys in The Netherlands, meeting tight delivery schedules and specifications within controlled budgets.

positioning stage for long travel

Long travel stage.

This linear positioning stage provides a solution for users looking for extended travel within an affordable budget, while maintaining good repeatability and dynamic performance. The single axis stage provides a full 2000mm travel within an overall length of less than 2500mm. The combination of a rugged linear motor with optical encoder position feedback and high performance linear rail bearings ensures a low maintenance unit with very high reliability. Housed in an aluminium base, the stage also has a full length rigid waycover to prevent debris falling inside.

positioning platform for laser machining

XYZ positioning platform for laser machining.

This platform was designed to assist with research into laser machining with various combinations of lasers, optics and materials. The challenge was to produce a flexible design in a short time scale while remaining within tight cost constraints. Positioning accuracy and motion dynamics are both important features of the platform, which consists of stacked XY stages on a granite base, plus a vertical Z axis mounted to the fixed granite bridge. The travels of the axes are respectively 1000mm, 750mm and 100mm. The absolute positioning accuracies are within 10 microns and repeatabilities of 1 micron. Although the XY is designed as a stack it still produces a flatness performance of just 3.5 microns. This is achieved by compensating for sag of the upper axis as a result of the moving mass. The system is supplied complete with a 3 axis motion controller and amplifiers.

air bearing system

Air bearing system for calibration purposes.

This calibration system uses a laser interferometer as a comparison standard against measurement devices under test. To optimise the system and reduce detrimental Abbe errors to a minimum, the geometrical accuracies must be extremely good. Flatness and sag of the granite base were key aspects during the design phase, with the end result being extraordinary performance. The air bearings use a vacuum preload arrangement to minimise distortion and also produce very smooth motion.

XY positioning system with hybrid bearings

XY Positioning system with hybrid bearing concept.

The concept is designed around a co-planar air bearing platform. One axis uses mechanical bearings. The saddle shaped carriage of the system is guided and lifted by air bearings and driven by an epoxy core linear motor. The axis using the mechanical bearings uses an iron core linear motor. Innovative design techniques ensure that angular errors are minimal despite the use of mechanical bearings on one axis.

inkjet printhead test system

Printhead test times reduced by factor of 50!

Q-Sys have supplied a bespoke motion system to a manufacturer of inkjet printheads as part of a new test system. The equipment is used to check printheads for correct operation by producing controlled test prints and immediately analysing the resulting pattern with an on-board camera.

The linear motor driven system can very accurately repeat motion patterns. This enables the characteristics of the ink delivery to be accurately assessed in the absence of significant motion platform errors.

The aims of the system were to reduce test cycle times in a smaller footprint machine and at lower cost. By designing a relatively small split axes platform, with the motion integrated directly onto a granite assembly, the system is considerably smaller than normal. Test times have been reduced from hours to just minutes while the system cost is 75% lower!.

Motion and positioning system field support and upgrades

Q-Sys is pleased to announce a service and support facility for owners and operators of high performance motion and positioning systems. Following last year’s closure of Anorad’s European offices, existing owners of Anorad systems have very limited options for technical support – not a satisfactory situation for the large installed base in the UK and mainland Europe.

Q-Sys was formed in 2007 by four senior managers from Anorad to continue the tradition of designing and building high specification motion platforms. Alongside this expertise, Q-Sys engineers are familiar with the majority of system hardware in use in Europe and are able to provide a comprehensive maintenance and repair service. This can range from the occasional call to rectify a system problem - through routine planned maintenance for essential production machines - all the way to full upgrades and refits on older or more heavily used equipment. This can of course incorporate full controller upgrades to take advantage of the significant improvements in hardware and software in recent years. Sometimes this can be the cost effective way to keep a system running longer and delay the need for more significant capital expenditure on whole system replacement.

Service support can be arranged either on an as required basis or through a managed service contract providing scheduled service visits, with emergency call out if required.